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UNE EN 62047-6:2010
Semiconductor devices - Micro-electromechanical devices -- Part 6: Axial fatigue testing methods of thin film materials (Endorsed by AENOR in June of 2010.)
Dispositivos semiconductores. Dispositivos micro-electromecánicos. Parte 4: Métodos de ensayo de la fatiga axial de los materiales de película. (Ratificada por AENOR en junio de 2010.)
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| Standard number: | UNE EN 62047-6:2010 |
| Pages: | 19 |
| Released: | 2010-06-01 |
DESCRIPTION
This standard UNE EN 62047-6:2010 Semiconductor devices - Micro-electromechanical devices -- Part 6: Axial fatigue testing methods of thin film materials (Endorsed by AENOR in June of 2010.) is classified in these ICS categories:
- 31.080.99