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>UNE standards>UNE EN ISO 23216:2023 - Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry (ISO 23216:2021)
in stockReleased: 2023-06-14
UNE EN ISO 23216:2023 - Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry (ISO 23216:2021)

UNE EN ISO 23216:2023

Carbon based films - Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry (ISO 23216:2021)

Películas a base de carbono. Determinación de las propiedades ópticas de las películas de carbono amorfo mediante elipsometría espectroscópica. (ISO 23216:2021).

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Standard number:UNE EN ISO 23216:2023
Pages:16
Released:2023-06-14
Status:Standard
Pages (Spanish):15
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UNE EN ISO 23216:2023

This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane. It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others. It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.