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UNE EN ISO 25178-603:2025
Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments (ISO 25178-603:2025) (Endorsed by Asociación Española de Normalización in April of 2025.)
Especificación geométrica de productos (GPS). Calidad superficial: Áreas. Parte 603: Diseño y características de los instrumentos sin contacto (microscopios interferométricos de desplazamientos de fase) (ISO 25178-603:2025) (Ratificada por la Asociación Española de Normalización en abril de 2025.)
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| Standard number: | UNE EN ISO 25178-603:2025 |
| Pages: | 29 |
| Released: | 2025-04-01 |
| Status: | Standard |
DESCRIPTION
UNE EN ISO 25178-603:2025
This document describes the design and metrological characteristics of phase shifting interferometry instruments for areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document can be applied to profiling measurements as well.