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>BSI Standards >31 ELECTRONICS>31.080 Semiconductor devices>31.080.01 Semiconductor devices in general>26/30551904 DC BS EN IEC 62047-61 Semiconductor devices - Micro-electromechanical systems Part 61: Evaluation methods of localized deformation and stretchability for Hybrid MEMS materials
immediate downloadReleased: 2026-07-03

26/30551904 DC

BS EN IEC 62047-61 Semiconductor devices - Micro-electromechanical systems Part 61: Evaluation methods of localized deformation and stretchability for Hybrid MEMS materials

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Standard number:26/30551904 DC
Pages:22
Released:2026-07-03
Status:Draft for Comment
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26/30551904 DC


This standard 26/30551904 DC BS EN IEC 62047-61 Semiconductor devices - Micro-electromechanical systems is classified in these ICS categories:
  • 31.080.01 Semiconductor devices in general

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