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Main page>BSI Standards >31 ELECTRONICS>31.080 Semiconductor devices>31.080.01 Semiconductor devices in general>26/30551908 DC BS EN IEC 62047-62 Semiconductor devices - Micro-electromechanical systems Part 62: Electrical resistance test method for hybrid MEMS materials under combined tensile and torsional deformation
immediate downloadReleased: 2026-07-03
26/30551908 DC BS EN IEC 62047-62 Semiconductor devices - Micro-electromechanical systems Part 62: Electrical resistance test method for hybrid MEMS materials under combined tensile and torsional deformation

26/30551908 DC

BS EN IEC 62047-62 Semiconductor devices - Micro-electromechanical systems Part 62: Electrical resistance test method for hybrid MEMS materials under combined tensile and torsional deformation

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Standard number:26/30551908 DC
Pages:19
Released:2026-07-03
Status:Draft for Comment
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26/30551908 DC


This standard 26/30551908 DC BS EN IEC 62047-62 Semiconductor devices - Micro-electromechanical systems is classified in these ICS categories:
  • 31.080.01 Semiconductor devices in general

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