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Released: 01.06.2015
ASTM E1127-08R15 - Standard Guide for Depth Profiling in Auger Electron Spectroscopy
Standard Guide for Depth Profiling in Auger Electron Spectroscopy
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| Standard number: | E1127-08R15 |
| Released: | 01.06.2015 |
| Status: | Active |
| Pages: | 5 |
| Section: | 03.06 |
| Keywords: | angle lapping; angle-resolved AES; Auger electron spectroscopy; ball cratering; compositional depth profiling; cross sectioning; depth profiling; depth resolution; sputter depth profiling; sputtering; thin films; |
DESCRIPTION
1.1 This guide covers procedures used for depth profiling in Auger electron spectroscopy.
1.2 Guidelines are given for depth profiling by the following:
|
| Section |
| Ion Sputtering | 6 |
| Angle Lapping and Cross-Sectioning | 7 |
| Mechanical Cratering | 8 |
| Mesh Replica Method | 9 |
| Nondestructive Depth Profiling | 10 |
1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
1.4 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.