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Homepage>BS Standards>81 GLASS AND CERAMICS INDUSTRIES>81.060 Ceramics>81.060.30 Advanced ceramics>BS ISO 22278:2020 Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam
immediate downloadReleased: 2020-08-26
BS ISO 22278:2020 Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

BS ISO 22278:2020

Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

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Standard number:BS ISO 22278:2020
Pages:38
Released:2020-08-26
ISBN:978 0 580 98589 8
Status:Standard
DESCRIPTION

BS ISO 22278:2020


This standard BS ISO 22278:2020 Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam is classified in these ICS categories:
  • 81.060.30 Advanced ceramics

This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.


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