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immediate downloadReleased: 2014-10-31
BS EN 62047-21:2014
Semiconductor devices. Micro-electromechanical devices Test method for Poisson's ratio of thin film MEMS materials
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| Standard number: | BS EN 62047-21:2014 |
| Pages: | 18 |
| Released: | 2014-10-31 |
| ISBN: | 978 0 580 77554 3 |
| Status: | Standard |
DESCRIPTION
BS EN 62047-21:2014
This standard BS EN 62047-21:2014 Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:
- 31.080.99 Other semiconductor devices
This part of IEC 62047 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 μm.