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Released: 01.03.2012
CSN EN 62047-9
Semiconductor devices - Micro-electromechanical devices - Part 9: Wafer to wafer bonding strength measurement for MEMS
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English Hardcopy
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Number of Standard: | CSN EN 62047-9 |
Category: | 358775 |
Pages: | 36 |
Released: | 01.03.2012 |
Catalog number: | 90139 |
DESCRIPTION
CSN EN 62047-9
Original English text of CSN EN Standard.
The price of the Standard included all amendments and correcturs.