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Main page>CSN Standards>12 VENTILATION ENGINEERING>1253 Equipment for clean rooms>CSN EN ISO 14644-14 - Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration
Released: 01.08.2026
CSN EN ISO 14644-14 - Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration

CSN EN ISO 14644-14

Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration

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Number of Standard:CSN EN ISO 14644-14
Category:125301
Pages:36
Released:01.08.2026
Catalog number:523937
DESCRIPTION

CSN EN ISO 14644-14

CSN EN ISO 14644-14 This document specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644-1. Particle sizes range from 0,1 µm to equal to or larger than 5 µm (given in ISO 14644-1).
Original English text of CSN EN Standard.
The price of the Standard included all amendments and correcturs.
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