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1253 Equipment for clean rooms

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Released: 2015
CSN EN ISO 14644-1
Cleanrooms and associated controlled environments - Part 1: Classification of air cleanliness by particle concentration
LANGUAGE
English
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Released: 2013
CSN EN ISO 14644-10
Cleanrooms and associated controlled environments - Part 10: Classification of surface cleanliness by chemical concentration
LANGUAGE
English
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Released: 2017
CSN EN ISO 14644-13
Cleanrooms and associated controlled environments - Part 13: Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications
LANGUAGE
English
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Released: 2016
CSN EN ISO 14644-14
Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration
LANGUAGE
English
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Released: 2017
CSN EN ISO 14644-15
Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
LANGUAGE
English
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Released: 2015
CSN EN ISO 14644-2
Cleanrooms and associated controlled environments - Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
LANGUAGE
English
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Released: 2005
CSN EN ISO 14644-3
Cleanrooms and associated controlled environments - Part 3: Test methods
LANGUAGE
English
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Released: 2001
CSN EN ISO 14644-4
Cleanrooms and associated controlled environments - Part 4: Design, construction and start-up
LANGUAGE
English
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Released: 2004
CSN EN ISO 14644-5
Cleanrooms and associated controlled environments - Part 5: Operations
LANGUAGE
English
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Released: 2004
CSN EN ISO 14644-7
Cleanrooms and associated controlled environments - Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
LANGUAGE
English
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Released: 2013
CSN EN ISO 14644-8
Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC)
LANGUAGE
English
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Released: 2012
CSN EN ISO 14644-9
Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration
LANGUAGE
English