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download between 0-24 hoursReleased: 2022
ISO 23170:2022
ISO 23170:2022-Surface chemical analysis-Depth profiling
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| Standard´s number: | ISO 23170:2022 |
| Pages: | 29 |
| Edition: | 1 |
| Released: | 2022 |
| Language: | English |
DESCRIPTION
ISO 23170:2022
This document specifies a method for the quantitative depth profiling of amorphous heavy metal oxide ultrathin films on Si substrates using medium energy ion scattering (MEIS).