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BS EN 62047-14:2012
Semiconductor devices. Micro-electromechanical devices Forming limit measuring method of metallic film materials
Semiconductor devices. Micro-electromechanical devices Forming limit measuring method of metallic film materials
Released: 2012-05-31
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181.45 USD
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181.45 USD
BS EN 62047-15:2015
Semiconductor devices. Micro-electromechanical devices Test method of bonding strength between PDMS and glass
Semiconductor devices. Micro-electromechanical devices Test method of bonding strength between PDMS and glass
Released: 2015-07-31
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181.45 USD
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181.45 USD
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181.45 USD
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181.45 USD
BS EN 62047-17:2015
Semiconductor devices. Micro-electromechanical devices Bulge test method for measuring mechanical properties of thin films
Semiconductor devices. Micro-electromechanical devices Bulge test method for measuring mechanical properties of thin films
Released: 2015-07-31
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BS EN 62047-18:2013
Semiconductor devices. Micro-electromechanical devices Bend testing methods of thin film materials
Semiconductor devices. Micro-electromechanical devices Bend testing methods of thin film materials
Released: 2013-10-31
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BS EN 62047-19:2013
Semiconductor devices. Micro-electromechanical devices Electronic compasses
Semiconductor devices. Micro-electromechanical devices Electronic compasses
Released: 2013-10-31
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BS EN 62047-1:2016
Semiconductor devices. Micro-electromechanical devices Terms and definitions
Semiconductor devices. Micro-electromechanical devices Terms and definitions
Released: 2016-04-30
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BS EN 62047-20:2014
Semiconductor devices. Micro-electromechanical devices Gyroscopes
Semiconductor devices. Micro-electromechanical devices Gyroscopes
Released: 2014-10-31
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352.66 USD
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352.66 USD
BS EN 62047-21:2014
Semiconductor devices. Micro-electromechanical devices Test method for Poisson's ratio of thin film MEMS materials
Semiconductor devices. Micro-electromechanical devices Test method for Poisson's ratio of thin film MEMS materials
Released: 2014-10-31
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BS EN 62047-22:2014
Semiconductor devices. Micro-electromechanical devices Electromechanical tensile test method for conductive thin films on flexible substrates
Semiconductor devices. Micro-electromechanical devices Electromechanical tensile test method for conductive thin films on flexible substrates
Released: 2014-10-31
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153.34 USD
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153.34 USD
English Secure PDF
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253.00 USD
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253.00 USD
BS EN 62047-26:2016
Semiconductor devices. Micro-electromechanical devices Description and measurement methods for micro trench and needle structures
Semiconductor devices. Micro-electromechanical devices Description and measurement methods for micro trench and needle structures
Released: 2016-05-31
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296.45 USD
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296.45 USD