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BS IEC 62047-47:2024
Semiconductor devices. Micro-electromechanical devices Silicon based MEMS fabrication technology. Measurement method of bending strength of microstructures
Semiconductor devices. Micro-electromechanical devices Silicon based MEMS fabrication technology. Measurement method of bending strength of microstructures
Released: 2024-08-28
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24/30499009 DC
BS IEC 63581-1 Semiconductor devices - The recognition criteria of defects in polished indium phosphide wafers Part 1: Classification of defects
BS IEC 63581-1 Semiconductor devices - The recognition criteria of defects in polished indium phosphide wafers Part 1: Classification of defects
Released: 2024-08-16
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BS IEC 62047-53:2025
Semiconductor devices. Micro-electromechanical devices MEMS electrothermal transfer device
Semiconductor devices. Micro-electromechanical devices MEMS electrothermal transfer device
Released: 2025-10-08
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BS EN 61223-3-1:1999
Evaluation and routine testing in medical imaging departments Acceptance tests
Evaluation and routine testing in medical imaging departments Acceptance tests
Released: 1999-08-15
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BS EN 62047-5:2011
Semiconductor devices. Micro-electromechanical devices RF MEMS switches
Semiconductor devices. Micro-electromechanical devices RF MEMS switches
Released: 2013-04-30
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BS EN IEC 62969-1:2018
Semiconductor devices. Semiconductor interface for automotive vehicles General requirements of power interface for automotive vehicle sensors
Semiconductor devices. Semiconductor interface for automotive vehicles General requirements of power interface for automotive vehicle sensors
Released: 2018-02-22
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BS IEC 62047-29:2017
Semiconductor devices. Micro-electromechanical devices Electromechanical relaxation test method for freestanding conductive thin-films under room temperature
Semiconductor devices. Micro-electromechanical devices Electromechanical relaxation test method for freestanding conductive thin-films under room temperature
Released: 2018-03-15
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BS EN 62047-7:2011
Semiconductor devices. Micro-electromechanical devices MEMS BAW filter and duplexer for radio frequency control and selection
Semiconductor devices. Micro-electromechanical devices MEMS BAW filter and duplexer for radio frequency control and selection
Released: 2011-08-31
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